@conference{95001,
  author = {Richard Silver and Ravikiran Attota and Egon Marx},
  title = {Model-Based Analysis of the Limits of Optical Metrology With Experimental Comparisons},
  year = {2007},
  number = {6617},
  month = {2007-06-18},
  publisher = {Proceedings of SPIE, Munich, GE},
  language = {en},
}