@conference{94986,
  author = {Michael Postek and Kevin Lyons},
  title = {Instrumentation, Metrology, and Standards: Key Elements for the Future of Nanomanufacturing},
  year = {2007},
  number = {6648},
  month = {2007-09-01},
  publisher = {Proceedings of SPIE, San Diego, CA},
  language = {en},
}