@conference{94941, author = {Michael Postek and Richard Cavanagh and C Allocca and Douglas Smith and Robert Shull and David Wollman and David Seiler and Stephen Knight and A Diebold and Richard Silver and Charles Clark and Kevin Lyons and James Whetstone and Ronald Boisvert}, title = {National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report}, year = {2006}, month = {2006-08-01}, publisher = {National Nanotechnology Initiative Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenge Report, Gaithersburg, MD}, language = {en}, }