@misc{94931,
  author = {James Potzick},
  title = {Antireflecting-Chromium Linewidth Standard, SRM 473, for Calibration of Optical Microscope Linewidth Measuring System},
  year = {1997},
  month = {1997-01-01},
  publisher = {Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}