@misc{94916,
  author = {John Villarrubia and Andras Vladar and Michael Postek},
  title = {Shape-Sensitive Linewidth Measurements of Resist Structures},
  year = {2004},
  month = {2004-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}