@conference{94886,
  author = {Ndubuisi Orji and Angela Martinez and Ronald Dixson and J Allgair},
  title = {Progress on Implementation of a CD-AFM Based Reference Measurement System},
  year = {2006},
  number = {6152},
  month = {2006-03-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}