@conference{94846,
  author = {Vivek Prabhu and Ronald Jones and Eric Lin and Christopher Soles and Wen-Li Wu and D Goldfarb and M Angelopoulos},
  title = {Polyelectrolyte Effects in Model Photoresist Developer Solutions: Roles of Base Concentration and Added Salts},
  year = {2003},
  number = {5039},
  month = {2003-01-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853867},
  language = {en},
}