@article{94786,
  author = {Wen-Li Wu and William Wallace},
  title = {Characterization of Planarity of Polymer Thin Films on Rough Surfaces},
  year = {1998},
  number = {3426},
  month = {1998-07-01},
  publisher = {SPIE series},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851479},
  language = {en},
}