@conference{94756,
  author = {Vivek Prabhu and B Vogt and Wen-Li Wu and Jack Douglas and Sushil Satija and D Goldfarb and H Ito},
  title = {Interfacial Structure of Photoresist Thin Films in Developer Solutions},
  year = {2005},
  number = {5753},
  month = {2005-03-01},
  publisher = {Proceedings of SPIE, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852460},
  language = {en},
}