@conference{94736,
  author = {Colm Flannery and Donna Hurley},
  title = {Laser Ultrasound: An Inspection Tool of Soft Porous Low-Dielectric Constant Films for Microelectronic Interconnect},
  year = {2003},
  number = {657},
  month = {2003-03-01},
  publisher = {Review of Progress in Quantitative Nondestructive Evaluation | | Review of Progress in Quantitative Nondestructive Evaluation, Volume 22 | AIP},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851310},
  language = {en},
}