@article{94721, author = {Chad Snyder and F Mopsik}, title = {A Precision Capacitance Cell for Measurement of Thin Film Out-of-Plane Expansion I Thermal Expansion}, year = {1998}, number = {69}, month = {1998-11-01}, publisher = {Review of Scientific Instruments}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851453}, language = {en}, }