@article{94651,
  author = {Donna Hurley and Roy Geiss and N Jennett and Malgorzata Kopycinska-Mueller and A Maxwell and Jens Mueller and David Read and J Wright},
  title = {Acoustical methods to determine thin-film and nanoscale mechanical properties},
  year = {2005},
  number = {20},
  month = {2005-05-31},
  publisher = {Journal of Materials Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50075},
  language = {en},
}