@article{94631, author = {Shuhui Kang and Vivek Prabhu and B Vogt and Eric Lin and Wen-Li Wu and Karen Turnquest}, title = {Effect of Copolymer Composition on Acid Catalyzed Deprotection Reaction Kinetics in Model Photoresists}, year = {2006}, number = {47}, month = {2006-06-25}, publisher = {Polymer}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852623}, language = {en}, }