@article{94431,
  author = {Hae-Jeong Lee and Christopher Soles and Eric Lin and Wen-Li Wu and Yiping Liu},
  title = {Non Uniform Structural Degradation in Porous Organosilicate Films Exposed to Plasma, Etching and Ashing as Characterized by X-Ray Porosimetry},
  year = {2007},
  number = {91},
  month = {2007-10-25},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852742},
  language = {en},
}