@book{94316,
  author = {Ronald Jones and Vivek Prabhu and D Goldfarb and Eric Lin and Christopher Soles and Joseph~undefined~undefined~undefined~undefined~undefined Lenhart and Wen-Li Wu and M Angelopoulos},
  title = {Correlation of the Reaction Front With Roughness in Chemically Amplified Photoresists},
  year = {2004},
  number = {874},
  month = {2004-07-01},
  publisher = {American Chemical Society, Washington DC, DC},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852147},
  language = {en},
}