@conference{94271, author = {David VanderHart and Vivek Prabhu and Anuja De and Nelson Felix and Christopher Ober}, title = {The Effect of EUV Molecular Glass Architecture on the Bulk Dispersion of a Photo-Acid Generator}, year = {2008}, number = {6923}, month = {2008-02-22}, publisher = {Proceedings of SPIE, San Jose, CA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853578}, language = {en}, }