@article{94131,
  author = {R Hedden and Hae-Jeong Lee and Christopher Soles and Barry Bauer},
  title = {Characterization of Pore Structure in Nanoporous Low-Dielectric Constant Thin Film by Neutron Porosimetry X-Ray Porosimetry},
  year = {2004},
  number = {20},
  month = {2004-07-02},
  publisher = {Langmuir},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852279},
  language = {en},
}