@article{94121,
  author = {Hyun and Ronald Jones and H Peng and Daniel Hines and Hae-Jeong Lee and Eric Lin and Alamgir Karim and Do Yoon and D Gidley and Christopher Soles},
  title = {The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography},
  year = {2007},
  number = {19},
  month = {2007-10-02},
  publisher = {Advanced Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852642},
  language = {en},
}