@conference{940156, author = {Kwanseob Park and Yoon Sung Bae and Sang-Soo Choi and Martin Sohn}, title = {Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging}, year = {2023}, number = {12496}, month = {2023-04-29 04:04:00}, publisher = {Reflective deep-ultraviolet Fourier ptychographic microscopy for nanoscale imaging , San Jose, CA, US}, doi = {https://doi.org/10.1117/12.2666132}, language = {en}, }