@article{93941, author = {Vivek Prabhu and B Vogt and Shuhui Kang and Eric Lin and Sushil Satija}, title = {Direct measurement of the spatial extent of the in situ developed latent image by neutron reflectivity}, year = {2007}, number = {25}, month = {2007-12-11}, publisher = {Journal of Vacuum Science and Technology B}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852747}, language = {en}, }