@article{93921,
  author = {Hyun and Yifu Ding and Hae-Jeong Lee and Daniel Hines and Ronald Jones and Eric Lin and Alamgir Karim and Wen-Li Wu and Christopher Soles},
  title = {Evidence for Internal Stresses Induced by Nanoimprint Lithography},
  year = {2006},
  number = {24},
  month = {2006-11-30},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852638},
  language = {en},
}