@conference{93806,
  author = {Donald Windover and N Armstrong and James Cline and P Hung and A Diebold},
  title = {Characterization of Atomic Layer Deposition Using X-Ray Reflectrometry},
  year = {2005},
  number = {788},
  month = {2005-11-13},
  publisher = {Proceedings| 2005},
  language = {en},
}