@article{93741,
  author = {Donna Hurley and K Shen and N Jennett and J Turner},
  title = {Atomic Force Acoustic Microscopy Methods to Determine Thin-Film Elastic Properties},
  year = {2003},
  number = {94},
  month = {2003-08-01},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851331},
  language = {en},
}