@article{93726,
  author = {Dylan Morris and Robert Cook},
  title = {Indentation Fracture of Low Dielectric Constant Films, Part II. Indentation Fracture Mechanics Model},
  year = {2008},
  number = {23},
  month = {2008-09-12},
  publisher = {Journal of Materials Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851100},
  language = {en},
}