@article{936741, author = {Stephen Moxim and James P Ashton and Mark Anders and Jason Ryan}, title = {Combining Electrically Detected Magnetic Resonance Techniques to Study Atomic-Scale Defects Generated by Hot-Carrier Stressing in HfO2/SiO2/Si Transistors}, year = {2023}, number = {133}, month = {2023-04-12 04:04:00}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936117}, doi = {https://doi.org/10.1063/5.0145937}, language = {en}, }