@conference{93646,
  author = {Ronald Jones and C Willson and T Hu and Vivek Prabhu and Christopher Soles and Eric Lin and Wen-Li Wu and D Goldfarb and M Angelopoulos and B Trinque},
  title = {Deprotection Volume Characteristics and Line Edge Morphology in Chemically Amplified Resists},
  year = {2003},
  number = {5039},
  month = {2003-06-01},
  publisher = {Proceedings of SPIE, Santa Clara, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852190},
  language = {en},
}