@article{93631,
  author = {Yifu Ding and Hyun and Jing Zhou and Brian Okerberg and Jack Douglas and Alamgir Karim and Christopher Soles},
  title = {Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns},
  year = {2008},
  number = {18},
  month = {2008-06-10},
  publisher = {Advanced Functional Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854115},
  language = {en},
}