@article{933476,
  author = {James E. Maslar and William A. Kimes and Vladimir B. Khromchenko and Brent Sperling and Ravindra Kanjolia},
  title = {Comparison of saturator designs for low volatility liquid precursor delivery},
  year = {2023},
  number = {607},
  month = {2023-04-01 04:04:00},
  publisher = {Journal of Crystal Growth},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935461},
  doi = {https://doi.org/10.1016/j.jcrysgro.2023.127102},
  language = {en},
}