@article{933326,
  author = {Mark Sobolewski},
  title = {Response to "Comment on 'The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor' "},
  year = {2022},
  number = {132},
  month = {2022-10-20 04:10:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935158},
  language = {en},
}