@article{931031, author = {Trevor Braun and Daniel Josell and Thomas P. Moffat}, title = {Simulation of Copper Electrodeposition in Millimeter Size Through-Silicon Vias}, year = {2020}, month = {2020-12-16 05:12:00}, publisher = {Journal of the Electrochemical Society}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930972}, language = {en}, }