@conference{92976,
  author = {James Maslar and Wilbur Hurst and Donald Burgess and William Kimes and Nhan Nguyen and Elizabeth Moore and Joseph Hodges},
  title = {In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition},
  year = {2008},
  number = {13},
  month = {2008-01-01},
  publisher = {ECS Transactions, Volume 13, Issue 2, Phoenix, AZ},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832216},
  language = {en},
}