@conference{92951,
  author = {Michael Postek and Andras Vladar},
  title = {The Potentials of Helium Ion Microscopy for Semiconductor Process Metrology},
  year = {2008},
  number = {6922},
  month = {2008-02-06},
  publisher = {Proceedings of SPIE, San Jose, CA},
  language = {en},
}