@article{929091, author = {Gheorghe Stan and Cristian Ciobanu and Sean King}, title = {Resolving the subsurface structure and mechanical property of layered films via contact-resonance atomic force microscopy}, year = {2022}, month = {2022-12-01 05:12:00}, publisher = {ACS Applied Materials and Interfaces}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934802}, doi = {https://doi.org/10.1021/acsami.2c17962}, language = {en}, }