@article{92851,
  author = {Chengqing Wang and Ronald Jones and Eric Lin and Wen-Li Wu and Jim Leu},
  title = {Small Angle X-Ray Scattering Measurements of Lithographic Patterns With Sidewall Roughness From Vertical Standing Waves},
  year = {2007},
  month = {2007-05-10},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852615},
  language = {en},
}