@article{928161,
  author = {Christopher Soles and Richard Kasica and Hae-Jeong Lee and Jae Sim and Sung-Il Lee and Ki-Bum Kim and Hyun-Mi Kim and Do Yoon},
  title = {Organosilicate Polymer E-Beam Resists with High Resolution, Sensitivity and Stability},
  year = {2013},
  month = {2013-02-28 05:02:00},
  publisher = {Applied Organometallic Chemistry},
  doi = {https://doi.org/10.1002/aoc.2985},
  language = {en},
}