@article{92706, author = {Hae-Jeong Lee and Christopher Soles and Hyun and Shuhui Kang and Eric Lin and Alamgir Karim and Wen-Li Wu}, title = {Characterizing Pattern Structures Using X-Ray Reflectivity}, year = {2008}, number = {6922}, month = {2008-03-28}, publisher = {SPIE}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852735}, language = {en}, }