@article{919061,
  author = {Taekyung Kim and Eikhyun Cho and Yoon Sung Bae and Sang-Soo Choi and Bryan Barnes and Richard M. Silver and Martin Sohn},
  title = {Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures},
  year = {2022},
  number = {152},
  month = {2022-02-01 05:02:00},
  publisher = {Optics and Lasers in Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932950},
  doi = {https://doi.org/10.1016/j.optlaseng.2022.106953},
  language = {en},
}