@conference{918936,
  author = {Bob R. Keller},
  title = {STEM-in-SEM: A Re-Emerging Material Measurement Approach},
  year = {2021},
  number = {27 (Suppl 1)},
  month = {2021-09-21 04:09:00},
  publisher = {M & M 2021, Pittsburgh, PA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=931948},
  doi = {https://doi.org/10.1017/S1431927621003962 },
  language = {en},
}