@article{918686,
  author = {Jason Holm},
  title = {A Brief Overview of Scanning Transmission Electron Microscopy in a Scanning Electron Microscope (STEM-in-SEM)},
  year = {2021},
  number = {4},
  month = {2021-11-01 04:11:00},
  publisher = {Electronic Device Failure Analysis},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932860},
  language = {en},
}