@conference{918306,
  author = {Bryan Barnes},
  title = {Optimizing Wavelengths for Optics-based Measurements of Advanced Electronics},
  year = {2021},
  number = {11783},
  month = {2021-09-15 04:09:00},
  publisher = {Modeling Aspects in Optical Metrology VIII, Munich, DE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932838},
  doi = {https://doi.org/10.1117/12.2593306},
  language = {en},
}