@conference{91736,
  author = {Jabez McClelland and R Scholten and R Gupta and Robert Celotta},
  title = {Laser Focused Atomic Deposition},
  year = {1994},
  number = {60},
  month = {1994-01-01},
  publisher = {Proceedings of SPIE, Volume 2125, Photochemistry and Processing, Los Angeles, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620438},
  language = {en},
}