@misc{917276,
  author = {Kyung Joong KIM and A Kim and S.C. Kim and S.W. Song and H. Ruh and W.E.S. Unger and J. Radnik and J. Mata-Salazar and J.M. Juarez-Garcia and O. Cortazar-Martinez and A. Herrera-Gomez and P.E. Hansen and J.S. Madsen and C.A. Senna and B.S. Archanjo and J.C. Damasceno and C.A. Achete and H. Wang and M. Wang and Donald Windover and Eric B. Steel and A. Kurokawa and T. Fujimoto and Y. Azuma and S. Terauchi and L. Zhang and W.A. Jordaan and S.J. Spencer and A.G. Shard and L. Koenders and M. Krumrey and I. Busch and C. Jeynes},
  title = {Thickness measurement of nm HfO2 films},
  year = {2001},
  month = {2001-01-01 05:01:00},
  publisher = {BIPM},
  language = {en},
}