@article{916756,
  author = {Alokik Kanwal and Robert Ilic and Christopher Ray and Kerry Siebein and James Alexander Liddle},
  title = {Chromium Oxide – A Novel Sacrificial Layer Material for MEMS/NEMS and Micro/Nanofluidic Device Fabrication},
  year = {2022},
  number = {16},
  month = {2022-08-01 04:08:00},
  publisher = {Micro and Nano Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933440},
  doi = {https://doi.org/10.1016/j.mne.2022.100145 },
  language = {en},
}