@misc{91651,
  author = {Christopher Evans and R Parks and L Shao and Angela Davies},
  title = {Interferometric Metrology of Photomask Blanks: Approaches Using 633 nm Wavelength Illumination},
  year = {2000},
  month = {2000-12-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}