@conference{916346, author = {X. Lyu and M. Si and Pragya Shrestha and Kin (Charles) Cheung and P. D. Ye}, title = {Dynamics studies of polarization switching in ferroelectric hafnium zirconium oxide}, year = {2021}, month = {2021-05-12 04:05:00}, publisher = {2021 5th IEEE Electron Devices Technology Manufacturing Conference (EDTM), Chengdu, CN}, doi = {https://doi.org/10.1109/EDTM50988.2021.9421035}, language = {en}, }