@conference{915706,
  author = {Taekyung Kim and Jason J. Gorman},
  title = {A 3-DOF MEMS motion stage for scanning tunneling microscopy},
  year = {2022},
  month = {2022-01-01 05:01:00},
  publisher = {The 35th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Tokyo, JP},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933782},
  doi = {https://doi.org/10.1109/MEMS51670.2022.9699453 },
  language = {en},
}