@conference{915636,
  author = {Craig R. Copeland and Ronald G. Dixson and Andrew Madison and Adam L. Pintar and Robert Ilic and Samuel M. Stavis},
  title = {Localization Microscopy for Process Control in Nanoelectronic Manufacturing},
  year = {2022},
  month = {2022-06-20 04:06:00},
  publisher = {The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) , Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934055},
  language = {en},
}