@article{914401,
  author = {Bob R. Keller and Benjamin Caplins and Jason Holm},
  title = {STEM-in-SEM: A Re-Emerging Material Measurement Approach},
  year = {2022},
  number = {60},
  month = {2022-06-01 04:06:00},
  publisher = {Microscopy and Analysis},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934564},
  language = {en},
}