@conference{914361,
  author = {Evgheni Strelcov and Lin You and Yaw S. Obeng and Joseph J. Kopanski},
  title = {Die-Level Micrometers-Deep Subsurface Imaging for Fault Isolation Using Remote Bias Induced Electrostatic Force Microscopy},
  year = {2022},
  month = {2022-10-30 04:10:00},
  publisher = {Conference Proceedings of the 48th International Symposium for Testing and Failure Analysis (ISTFA 2022), Pasadena, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935283},
  doi = { https://doi.org/10.31399/asm.cp.istfa2022p0426},
  language = {en},
}