@article{914156, author = {Kin (Charles) Cheung}, title = {On the "intrinsic" breakdown of thick gate oxide}, year = {2022}, number = {132}, month = {2022-10-12 04:10:00}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935108}, doi = {https://doi.org/10.1063/5.0118081}, language = {en}, }